Sl.No Item Name Quantity
1 Chlorine (Cl2) – VLSI Grade( 212213052 ) 50KG
2 Cylinder of Chlorine (Cl2) – VLSI Grade( 212517077 ) 1Nos.
3 Halocarbon 23 (CHF3) – VLSI Grade( 212213053 ) 30KG
4 Cylinder of Halocarbon 23 (CHF3)–VLSI Grade( 212517078 ) 1Nos.
5 Sulphur Hexa Fluoride (SF6) - VLSI Grade( 210213024 ) 50KG
6 Cylinder Of Sulphur Hexa- Fluoride (SF6) 99.99 percent( 210417027 ) 1Nos.
7 Halocarbon 14 (CF4)( 212213055 ) 30KG
8 Cylinder of Halocarbon 14 (CF4)( 212517080 ) 1Nos.
9 SiH4 12KG
10 Cylinder of gas SiH4 1Nos.
11 Nitrous Oxide (N2O) - VLSI Grade 54KG
12 Cylinder of Nitrous Oxide (N2O) - VLSI Grade 2Nos.
13 HALOCARBON(C2F6)- VLSI Grade( 210213059 ) 40KG
14 Cylinder Of Freon Halocarbon-116 Gas - VLSI Grade 1Nos.